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Cover of MEMS and MOEMS Technology and Applications (SPIE Press Monograph Vol. PM85)

MEMS and MOEMS Technology and Applications (SPIE Press Monograph Vol. PM85)

by P. Rai-Choudhury

2000 528 pages eng

Microelectromechanical systems Optoelectronics Optoelectronic devices Microelectronics

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