pandaMicroelectromechanical systems
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Piezoelectric-based vibration-control
Advanced Mechatronics And Mems Devices
Electromechanical systems, electric machines, and applied mechatronics
Laboratory Exercises In Mechatronics
BioMEMS
MICROSYSTEMS TECHNOLOGY: FABRICATION, TEST AND RELIABILITY; ED. BY JUMANA BOUSSEY
Introduction to bioMEMS
MEMS and Microsystems
Mechanisms Transmissions And Applications
Neural Networks and Micromechanics
Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
Laser Diode Microsystems
Handbook of silicon based MEMS
Fundamentals of microfabrication
Modeling MEMS and NEMS
An introduction to microelectromechanical systems engineering
Microelectrofluidic systems
A guide to hands-on MEMS design and prototyping
Practical Applications of Microresonators in Optics and Photonics
Mechatronics
Essentials of micro- and nanofluidics
Spintronic materials and technology
Foundations of MEMS
Expeditionen in den Nanokosmos
Microsystem design
Fundamentals and applications of microfluidics
Bio-MEMS
Self Assembly
MEMS and MOEMS Technology and Applications (SPIE Press Monograph Vol. PM85)
Feedback control of MEMS to atoms
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